PRODUCTS Used Products
Sense Corporation deliver used SMIT ion implanters that meet strict quality standards.
Sense Corporation sell used SMIT ion implanter. We can also make proposals for the manufacture or modernization of obsolete parts. Please feel free to contact us. We pursue speed and cost minimization, and never compromise on quality. We deliver only products that meet the same strict standards as new products and are confirmed to be of high specifications.
Stock List
| Model | Wafer Size | Category | Energy Range | Vintage | Product Number | Modification Items (Example) | ||||
|---|---|---|---|---|---|---|---|---|---|---|
| Wafer Size Change | TAIKO Wafer | SiC Wafer | Al Implantation | H+ Implantation | ||||||
| NV-GSD-HE | 8 | High Energy | 10keV~3000keV | 06/01 | L35 | 6~8inch | 6~8inch | 6~8inch | ✔ | ✔ |
| NV-GSD-HE | 8 | High Energy | 10keV~3000keV | 01/06 | H96 | 6~8inch | 6~8inch | 6~8inch | ✔ | ✔ |
| NV-MC3 FOUP | 12 | Middle Current | 5Kev~750Kev | 00/12 | P06 | 6~12inch | 6~8inch | 6~8inch | ✔ | ✔ |
| NV-MC3 (CE/S2) | 12 | Middle Current | 5Kev~750Kev | 05/05 | P48 | 6~12inch | 6~8inch | 6~8inch | ✔ | ✔ |
| LEX3/LEX3-II/LEX3-M | 12 | High Current | 5keV~70keV | 06/11 | I75 | - | Asking | Asking | ✔ | |
| SHX-III/S | 12 | High Current | 0.2～50keV | 14/06 | AX34 | 8~12inch | Asking | Asking | ✔ | ✔ |
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The SHX series that enables ultra-low energy ion implantation with high accuracy, high quality, and high beam current
SPEC
SHXⅢS(AX34）PICK UP
- Model
- SHX-Ⅲ/S
- Product Number
- AX34
- Serial Number
- X053
- Vintage
- 2014/6
- Energy Range
- 0.2keV～50keV
- Wafer Size
- 300mm
〈Basic Specification〉
- Power Supply &
Freaquancy - 200V 3φ 50Hz
- Casstte
- 4
- Servo（AC/DC）
- AC
- Source
- ELS（no VAP）
- Shower Type
- Plasma Shower
- Gas
- BF3, PH3, O2×2
The state-of-the-art, high-performance MC3 medium-current ion implanter that pursues the highest level of implantation quality in the world
SPEC
MC3(P06）PICK UP
- Model
- NV-MC3
- Product Number
- P06
- Serial Number
- P006
- Vintage
- 2000/12
- Energy Range
- 5keV～750keV
- Wafer Size
- 300mm
〈Basic Specification〉
- Power Supply &
Freaquancy - 200V 3φ 50Hz
- Casstte
- 4
- Servo（AC/DC）
- AC
- Source
- ELS（no VAP）
- Shower Type
- Electron Shower
- Gas
- BF3, PH3, AsH3
Global standard for high-energy ion implanters from which high productivity can be expected
SPEC
HE(H96）PICK UP
- Model
- NV-GSD-HE
- Product Number
- H96
- Serial Number
- H080
- Vintage
- 2001/6
- Energy Range
- 10keV～3,000keV
- Wafer Size
- 200mm
〈Basic Specification〉
- Power Supply &
Freaquancy - 200V 3φ 60Hz
- Casstte
- 4
- Servo（AC/DC）
- AC
- Source
- ELS（no VAP）
- Shower Type
- N/A
- Gas
- BF3, PH3, AsH3